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SRS RGA300 Residual Gas Analyzer

Quadrupole-based residual gas analyzer up to 300 amu with high resolution, wide dynamic range, low detection limit and Windows/LabVIEW-based real-time analysis.


  • 300 amu system
  • Better than 1 amu resolution
  • 6 orders of magnitude dynamic range in a single scan
  • 5 x 10-14 Torr detection limit
  • RGA Windows and LabVIEW software
  • Field-replaceable electron multiplier and filament
  • RS-232 interface

The 300 amu residual gas analyzer from SRS offer exceptional performance and value. This RGA provide detailed gas analysis of vacuum systems at about half the price of competitive models. Each RGA system comes complete with a quadrupole probe, electronics control unit (ECU), and a real-time Windows software package that is used for data acquisition and analysis, as well as probe control.

Product information

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    SRS RGA300 Residual Gas Analyzer

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