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SRS PPR100 Process Monitoring System

Up to 100 amu for measurement at 0.01–10 Torr with fast response time, wide dynamic range and RGA Windows software.


  • 0.01, 0.1, 1.0 or 10 Torr inlet pressure
  • 3 ´ 10-5 Torr-L/s flow rate
  • 2 second response time (0.1 Torr)
  • 100 amu system
  • Field-replaceable electron multiplier and filament
  • 6 orders of magnitude dynamic range
  • RGA Windows software

Product information

  • Art.no

    SRS PPR100, 100 amu Process Monitoring System

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